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Doctor of Philosophy Work

Observations on Smooth, Diamond-Like Composition Films Deposited at Low Temperature via an Electron Cyclotron Resonance-Microwave-Chemical Vapor Deposition One-Step Process

Depiction of the Ambipolar-State of the Gas-Substrate Interphase of the Electron Cyclotron Resonance – Microwave – Chemical Vapor Deposition (ECR-MW-CVD) Method and Its Influence Over the Properties of Vapor-Deposited Htdrocarbon Films - DISSERTATION

Depiction of the Ambipolar-State of the Gas-Substrate Interphase of the Electron Cyclotron Resonance – Microwave – Chemical Vapor Deposition (ECR-MW-CVD) Method and Its Influence Over the Properties of Vapor-Deposited Htdrocarbon Films

ORCID

The relationship between the processing conditions for an electron cyclotron resonance- (ECR) microwave- (MW) chemical-vapor–deposition (CVD) system and the properties of hydrocarbon films

Effect of High Ion and Electron Densities and Substrate Temperature on the Properties of Glow-Discharge-Polymer Films

Thanks!

Laboratory for Laser Energetics (LLE)
New York State Energy Research and Development Authority (NYSERDA)
National Nuclear Security Administration (NNSA)

Jesús M. García-Figueroa 

Ph.D., M.E., CLSSBB

Jesús M. García-Figueroa

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